| Thermal design of hot plate for 300-mm wafer heating in post-exposure bake | |
|---|---|
| Publication Year | 2011 |
| Journal Name | Microelectronic Engineering |
| Volume Number | 88 |
| Page Number | 3195–3198 |
| Author | Jinho Lee, Hyun Goo Kwon, Sangwoo Shin, Sangjo Han, Jungik Ha, Hosun Yoo, Hyung Hee Cho |
Publication
Heat Transfer Laboratory
- Publication
- International journal
International journal